Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning

no code implementations • 12 Feb 2021 • Anna Andrle, Philipp Hönicke, Grzegorz Gwalt, Philipp-Immanuel Schneider, Yves Kayser, Frank Siewert, Victor Soltwisch

The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic circuits.

Applied Physics

Invertible Neural Networks versus MCMC for Posterior Reconstruction in Grazing Incidence X-Ray Fluorescence

no code implementations • 5 Feb 2021 • Anna Andrle, Nando Farchmin, Paul Hagemann, Sebastian Heidenreich, Victor Soltwisch, Gabriele Steidl

Grazing incidence X-ray fluorescence is a non-destructive technique for analyzing the geometry and compositional parameters of nanostructures appearing e. g. in computer chips.