Autonomous sputter synthesis of thin film nitrides with composition controlled by Bayesian optimization of optical plasma emission

no code implementations • 18 May 2023 • Davi M. Febba, Kevin R. Talley, Kendal Johnson, Stephen Schaefer, Sage R. Bauers, John S. Mangum, Rebecca W. Smaha, Andriy Zakutayev

Here, we report the design and implementation of an autonomous workflow for sputter deposition of thin films with controlled composition, leveraging a highly automated sputtering reactor custom-controlled by Python, optical emission spectroscopy (OES), and a Bayesian optimization algorithm.

Bayesian Optimization